| ■主要參數 ?(Specifications) |
型號 ModelVTC-050VTC-150法蘭內徑Flange size吸氣口 InletICF114ICF152排氣口 OutletNW16NW16渦輪分子泵排氣速度TMP pumping speedN2L/s50190H2L/s40160**壓力 ?Ultimate pressurePa10-6臺（無熱烘 No baking）噪音 Noise leveldB(A)60粗輾真空泵 ?Foreline pumpISP-250B-SV輸入電壓 ?VoltageV單相 Single phase 100重量 Weightkg4954外形尺寸 DimensionsmmW 350×L 490×H 591W 350×L 490×H 638選項 Optional parts箱、真空計、自動閥等Chamber, Vacuum gauge, automatic value
型號 ModelVTU-050VTU-500法蘭內徑Flange size吸氣口 InletICF114ICF203排氣口 OutletNW16NW25渦輪分子泵排氣速度TMP pumping speedN2L/s50550H2L/s40500**壓力 ?Ultimate pressurePa10-6臺（無熱烘 No baking）噪音 Noise leveldB(A)5660粗輾真空泵 ?Foreline pumpISP-90ISP-500B-SV輸入電壓 ?VoltageV單相 Single phase 100重量 Weightkg2593外形尺寸 DimensionsmmW 350×L 340×H 285W 430×L 570×H 740選項 Optional parts箱、真空計、自動閥等Chamber, Vacuum gauge, automatic value |
※當客戶使用自己指定的渦輪分子泵組成高真空排氣系統時，請詢問相關事項。
If you have any preference of turbo molecular pump, it could be chosen.
在未指定時，按**重工業株式會社制造的渦輪分子泵配置。 |
| ■ 特點 （Features） |
| ■干凈排氣?真空采用渦輪分子泵與無油渦旋式真空泵組合方式，完全干燥干凈的高 真空排氣系統?！鼋Y構緊湊由于非常緊湊且安裝占地面積少，可在現在已使用中的裝置近旁安裝。且附腳輪便于移動?！霾僮餍阅芎帽靖哒婵张艢庀到y具有渦旋真空泵和渦輪分子泵分別單獨運行的手動操作和一個按鈕同時開始兩泵運行的自動操作※等兩種方式?？砂从猛具x擇。??? ※在進行自動操作時，對包含箱和配管部件的容量有限制?！ 鯟lean Discharge and VacuumThis high vacuum pumping system is completely dry system because it consists of oil-free scroll vacuum pump (ISP) and turbob molecular pump (TMP).■Compact DesignSince this pumping system is compact design and footprint is minimized, it can be installed near your vacuum system. It is easy to move.■HandlingIts controller has two ways to start to run TMP, manually or automatically.※. It can be chosen by the application and preference.※ In the case of automatic start, it is restricted by volume of chamber and pipes. |
| ■選擇項（Option） |
| ■渦輪分子泵可用客戶指定的渦輪分子泵組成高真空排氣系統。請詢問渦輪分子泵的的安裝方向?！銎渌?、真空計、自動閥等可選部分按您的需求安裝?！ 鯰urbo Molecular PumpIf you have any preference of TMP, it could be chosen. Ask for TMP and installation direction of TMP.■OthersAsk for chamber, vacuum gauge and automatic valve because they are optional. |
| ■ 使用用途 (Applications) |
| ■加速器(Accelerator)■X線分析裝置 ?(X-ray Fluorescence Spectroscopy)■同步加速器放射 (Synchrotron Radiation) ■電子顯微鏡 (SEM/TEM)■泄漏測試 ?(Leak Test)■各種試驗?分析裝置 (Various Analyzers)■重量分析裝置 ?(Mass Spectrometer)■輔助高 真空排氣裝置■表面分析裝置 ?(Surface Analyzer)■其他 |
| ■安全注意事項（Precaution on Usage） |
■這種真空泵是清潔排氣規格。請不能排放對人體有毒的氣體、爆炸火災危險性的氣體、腐蝕性氣體、藥品、溶劑、粉狀體等物質。對于排放了特殊氣體等的泵本公司不承擔維護保修責任，請予以諒解?！稣堅诃h境溫度5℃～40℃范圍內使用。希望將室、真空計、自動閥等一起同時安裝?！ 鯰his pumping system is suitable for clean processes only.Do not use explosive, flammable, toxic or corrosive substances or substances which contain chemicals, solvents or particles.? will not perform maintenance work on pumps which have used hazardous substances. ■Use at ambient operation temperature in the range of 5℃ to 40℃Ask for chamber, vacuum gauge and automatic valve because they are optional.
■ 特點（Features）■干凈排氣?真空由于DVSL真空泵的泵體不使用潤滑油和封水，軸承等完全不與接氣部位接觸，因而能獲得完全干燥、清潔的 真空，也沒有油煙。As DVSL vacuum pumps do not contain lubricating oil or sealing water and no bearings through gas path, it ensures clean vacuum and no oil mist.■新功能?新結構在完全干式型的基礎上，通過增加空氣閃噴功能，提高了水蒸氣·異物的排泄·耐久性·維護周期。The Air Flush device has been added as a standard feature as well as the original dry vacuum system. Reliability and maintenance interval as well as evacuating performance of water vapor and small particles have been now remarkably improved.■ DVSL-500B 規格（Specifications）型號Model DVSL-500BDVSL-501B設計排氣速度Displacement L/min（50/60Hz）430 / 520**壓力Ultimate pressure Pa {Torr}10 {7.5×10-2}30 {2.2×10-1}電動機輸出Motor powerkW (50/60Hz)0.9 / 1.1電壓VoltageV三相Three phase200、208、230 / 380、415、460噪音值Noise leveldB(A)65（at Air Flush 70）重量Weightkg5240水蒸氣處理量Water vaporg/day250（at Air Flush）空氣噴發量Air-flushl/min10（at Air Flush）外型尺寸DimensionsL503×W318×H361(392)L497×W313×H298吸氣口徑Inlet connectionNW25（內徑 Inside Rc 1/2）排氣口徑Outlet connectionNW25冷卻方式Cooling system空氣冷卻Air cooled標準配置Standard equipment空氣閃噴器、計時器Air Flush 、Hour counter選項Option水擋水板消音器（Rc 1/2）Water separator & silencer?**壓力是全程壓力測量值。Ultimate pressure is measured as total pressure.?噪音值是在無音室中的測量值。Noise is measured in an anechoic room.■使用用途（Applications）■真空形成(Vacuum Forming)■真空沖洗干燥(僅水系)(Vacuum Drying only for water based)■脫泡·脫氣(Deairater)■陶瓷業(Ceramic Industry)■真空吸附 (Vacuum Chuck)■氣體置換(Gas Substitution)■Cry泵的粗輾?再生(Regeneration)■電子管真空(Pumping for Electron Tube)■真空冷卻(Vacuum Cooling) ■安全注意事項（Precaution on Usage）■這種真空泵是清潔排氣規格。請不能排放對人體有毒的氣體、爆炸火災危險性的氣體、腐蝕性氣體、藥品、溶劑、粉狀體等物質。對于排放了特殊氣體等的泵本公司不承擔維護保修責任，請予以諒解?！his pumping system is suitable for clean processes only. Do not use explosive, flammable, toxic or corrosive substances or substances which contain chemicals, solvents or particles.? will not perform maintenance work on pumps which have used hazardous substances.■使用環境溫度應在5℃～40℃范圍?！se at ambient operation temperature in the range of 5℃ to 40℃. |
